Facilities

The activities of the UVML share a 3,500 square foot clean room for microfabrication and materials research as well as a variety of other facilities for nanotechnologies, device design and testing, millimeter and submmillimeter electronics, biomedical and electronic microsystems, microwave and optical analysis, and virtual electronics and integrated prototyping.
Facilities

Deposition Tools

UVML-facilities-depo

  • Tool No. 1
  • Tool No.  2
  • Tool No.  3
  • Tool No.  4
  • Tool No.  5

 

Etch Tools

UVML-facilities-etch

  • Tool No. 1
  • Tool No.  2
  • Tool No.  3
  • Tool No.  4
  • Tool No.  5

Analytical Tools

UVML-facilities-analytical

  • Tool No. 1
  • Tool No.  2
  • Tool No.  3
  • Tool No.  4
  • Tool No.  5

 

The Tog Room

The gowning, or “Tog Room” is the starting point into the many areas of the lab’s cleanroom. Here, lab users don their protective apparel.

cords
green
bigdevice